사업소개
사업소개
- 회사소개
- 연구개발
- 고객센터
서비스
- 반도체 장비 사업
- 파트판매
개조 개선 및 수리 서비스
- CMP
- CVD
- PVD
- ETCH
-
0195-02883
PRI CMP WET ROBOT / REFLEXION* AVAILABLE FOR SERVICE REBUILD ONLY -
04-101-PL-A07
PLATEN RINSE INTERLOCK / MIRRA 3400* AVAILABLE FOR SERVICE UPGRADES ONLY -
04-101-PL-A06
UPPER PNEUMATIC TITAN / MIRRA 3400* AVAILABLE FOR SERVICE UPGRADES ONLY -
0010-77184
UPPER PNEUMATIC TITAN / MIRRA 3400* AVAILABLE FOR SERVICE REBUILD ONLY -
0190-14775
FACILITIES PNEUMATICS PANEL / REFLEXION LK* AVAILABLE FOR SERVICE REBUILD ONLY -
0010-56921
AMAT 12" CMP PAD CONDITIONER / REFLEXION LK* AVAILABLE FOR SERVICE REBUILD ONLY -
0020-79256
MIRRA CMP PAD CONDITIONER / MIRRA 3400* AVAILABLE FOR SERVICE REBUILD ONLY -
1080-00260
MOTOR SERVO AMPLIFIER / REFLEXION LK* AVAILABLE FOR SERVICE REBUILD ONLY -
0190-34538
TOKYO KEISO FLOW CONTROLLER / REFLEXION LK* AVAILABLE FOR SERVICE REBUILD ONLY -
1080-00275
DRVR SERVO MOTOR FOR 7.5KW MOTOR / REFLEXION LK* AVAILABLE FOR SERVICE REBUILD ONLY -
3970-00029
DRIVE RDCR PLANTARY GEARHEAD / REFLEXION LK* AVAILABLE FOR SERVICE REBUILD ONLY -
1080-00255
PLATEN ROTATION MOTOR / REFLEXION LK* AVAILABLE FOR SERVICE REBUILD ONLY -
0190-46576
HEAD ROTATION MOTOR DRIVERS / REFLEXION LK* AVAILABLE FOR SERVICE REBUILD ONLY -
0190-11332
HEAD ROTATION MOTOR / REFLEXION LK* AVAILABLE FOR SERVICE REBUILD ONLY -
04-101-PL-A05
MIRRA CMP E-CHAIN RETROFIT / MIRRA 3400* AVAILABLE FOR SERVICE UPGRADES ONLY -
04-101-PL-A05
MIRRA CMP UPA RETROFIT / MIRRA 3400* AVAILABLE FOR SERVICE UPGRADES ONLY -
04-101-PL-A04
MIRRA UPA VAC REJECTOR RETROFIT / MIRRA 3400* AVAILABLE FOR SERVICE UPGRADES ONLY -
04-101-MS-A03
MESA BRUSH DIRECT LDM / MIRRA MESA* AVAILABLE FOR SERVICE UPGRADES ONLY -
04-101-PL-A02
MIRRA CMP PAD CONDITIONER / MIRRA 3400* AVAILABLE FOR SERVICE UPGRADES ONLY -
03-101-PL-A01
HEAD ROTATION DIRECT DRIVE MOTOR / MIRRA 3400* AVAILABLE FOR SERVICE UPGRADES ONLY